This item is being sold on behalf of one of our clients and is not held in our own stock.

Please enquire with us if you would like to buy this item as shipping, warranty and the terms and conditions of sale will be dependent on the client's needs.

ATV PEO-604 Thermal Oxidation Furnace , Chiller & Laptop (Serviced Aug 2024)

This equipment is being offered on behalf of our client, Adaptix Ltd, following the closure of cleanroom facilities at the Harwell Campus (November 2024).

The ATV PEO-604 is a high-temperature thermal oxidation furnace designed for semiconductor wafer processing, supporting both dry and wet oxidation processes. The system is currently configured for 4” (100 mm) wafers and can be upgraded to accommodate up to 6” wafers with replacement quartzware. The furnace includes a water bubbler system for steam generation and offers a maximum operating temperature of 1100°C.

The system was commissioned in April 2023 and was last used in September 2024. The client has confirmed the instrument was in good working condition at the time the cleanroom closed. It subsequently underwent annual service and calibration on 29/08/2024. Following decommissioning, fragile components and quartzware were professionally removed by the vendor for safe relocation and are securely packed.

Performance & Configuration Highlights

• Maximum operating temperature: 1100°C
• Configured for 4” wafers (upgradeable to 6” with appropriate quartzware)
• Integrated water bubbler for steam generation (wet oxidation capability)
• Commissioned April 2023
• Annual service and calibration completed 29/08/2024

Included Equipment

• ATV PEO-604 Thermal Oxidation Furnace (main unit)
• Air-cooled compressor-based closed loop water chiller
• ATV Laptop (Windows 10, English version) with pre-installed WinATV software
• 1 x Wafer boat carrier (for wafer boats up to 100 mm)
• 2 x Dummy wafer boat (5 wafers – 100 mm)
• 1 x Wafer boat (25 wafers – 100 mm)
• Associated quartzware (removed for transport; securely packed)

The system is largely packaged for transport (plastic wrap to be reinstated).

Collection is available from: Rutherford Appleton Laboratory, Harwell Campus, Didcot, OX11 0QX, United Kingdom.

Buyer collection is welcome. Professional handling and transport are strongly recommended due to the specialist nature of the equipment.

Normal terms and conditions do not apply to this item, which is sold as seen / where is, non-returnable and non-refundable, and subject to prior sale.