Ultra-High Vacuum (UHV) Systems and Chambers
Items 1 to 9 of 9
SPARES/REPAIR ITEM
SPARES/REPAIR ITEM
£ 20,000.00 (ex. VAT) 1 in stock
Vacuum Deposition / CVD System – Multi-Component High-Vacuum Processing Assembly
ITEM-50636
Vacuum Deposition / CVD System – Multi-Component High-Vacuum Processing Assembly
This system is sold on behalf of a client where it is no longer required.
The equipment consists of a complete vacuum deposition / CVD assembly with associated control electronics, vacuum components, high-vacuum pumps, RF power supplies, actuators, and sensors. The frame was originally manufactured in 1998 and was extensively retrofitted in 2011 with updated components. According to system logs, the last use was in 2021.
The system is offered as-is / for parts / repair, as the machine has not been fully powered or tested. Only the control cabinet has been energised. The system was not fully connected and lacked a password, preventing further testing or verification of safety compliance.
The system comprises the following major components:
Vacuum & Pumping Components
- ALCATEL / ADIXEN / PFEIFFER ATH 1300M turbo pump
- 2× Leybold Vacuum CTR 90 CERAVAC
- PFEIFFER IKR 251 compact cold cathode gauge
- VAT 26432-KA41-0001/0319 vacuum angle valve
- Additional large VAT vacuum valve
- Large high-vacuum valve assembly
- Gas Handling, Actuation & Process Hardware
- Actuation System THC-8AWDS linear actuator (400 mm travel)
- Various sensors, including pressure, temperature and switching sensors
- Various actuators including solenoid valves and heating elements
- CVD frame (original SP-500, retrofitted 2011)
- Mass flow control cabinet (included)
Safety & Process Protection
- 4× PROTEGO 42 DZ/T-40 pressure/vacuum relief valves
- 4× In-line detonation flame arresters DA-G-1 1/2"-IIC-P1.6
- RF & Power Delivery
- RF DRESSLER – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
- RFPP RF10S unit
- Advanced Energy MDX 500 magnetron drive (non-functional – does not turn on)
- RF Power AM-5 7600001010, 500 W, 13.56 MHz
- TDK Lambda power supply
Control Unit & Electronics
- ALCATEL / ADIXEN / PFEIFFER ACT 1300M controller
- MKS Type 252C-1-VPO exhaust valve controller
- MKS Type 152 automatic pressure controller
- MKS Type 600 automatic pressure controller
- MKS Type 2708
- 19″ rack-mount PC (no password for the control software)
Accessories & Included Items
- Connected cabling and installed modules
- Control cabinet with mass flow system
- Various sensors and actuators integrated into the frame
The seller can package the system securely for transport, requiring approximately one week to prepare, with an additional charge. Customer courier collection is also acceptable.
The system is available for collection from Gevrey-Chambertin, France.
£ 18,000.00 (ex. VAT) 1 in stock
Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab
ITEM-41952
Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab
This system was removed from a university lab where it was surplus to requirement.
The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.
It is in good cosmetic condition with all units included in good working order.
The system comprises the following components:
- Thermo Vacuum Generators main reaction chamber
Serial No. CH0412005
- 2 x Softshut gate units Part No. V10EA100
Serial Nos. SS0412002 SS0412003
- Leybold Turbovac Pump Serial No. 30000045767
- Pfeiffer Vacuum compact cold cathode gauge Type IKR261
BOC Edwards EXT75DX turbomolecular high vacuum pump
Serial No. 046074705
- 3 x Luftkuelung pump cooling fans
- 3 x Vulcatherm V1 1000W heaters
- 2 x Elstein FSR 1000W heaters
- RHC Vacuum Generators ZRHC substrate heater controller
Serial No. RC0407002
- Turbotronik NT20 and NT10 analysis chamber and load lock control unit
Serial No. 30000050971
- Thermo Electron AML pressure gauge controller
Serial No. 0006
- Thermo Electron 8558 argon etch gun controller
Serial No. G117
- Hiden Analytical ion gun turbo interface
- Pfeiffer ion gas gun gauge
- Power breaker circuit box
- Leybold vacuum pump Type D16B serial No. 30000044357
- Edwards vacuum pump E2M1 serial No. 046078290
- Leybold vacuum pump type S1.5 serial No. 20900831099
Additional parts:
- 2 x 16 amp cartridge fuses
- 14 x 2 amp cartridge fuses
- 1 x filament for ion gauge DC7033AA
- 2 x air 1/4" tee pieces
- 1 x pfeiffer seal for ion gun BN846241-T
- 4 x resistor filaments
- 1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x
Operating and instruction manuals:
- Thermo EX03 Ion Gun System
- Thermo High Pressure Gas Cell
- Arun Microelectronics Pressure Gauge Controller Interface
- Pfeiffer Vacuum TPG261
- Varian MidiVac Controller 929-x
- Varian Sublimation Controller 929-x
- Leybold Turbovac
- Leybold turbotronik NT20 - NT10
- Eurotherm 2132 and 2166 PID Temperature Controllers
£ 12,000.00 (ex. VAT) 1 in stock
Edwards Auto 306 Thermal Evaporator Coating System Lab
ITEM-39970
Edwards Auto 306 Thermal Evaporator Coating System
This was removed from a university lab where it was surplus to requirements.
The unit powers up but has not been tested further. The system boots up and the internal pump runs.
Item contains:
Edwards RV12 Pump
Serial#: 006774738
Edwards Oil Mist Filter EMF10
Code#: A223 04 198
Edwards PV25EKA
Serial#: 006693767
Edwards B3060424A
Serial#: 006739951
£ 7,500.00 (ex. VAT) 1 in stock
Large Mu-Metal Multi-Port Vacuum Chamber for Magnetic Shielding
ITEM-47661
Large Mu-Metal Multi-Port Vacuum Chamber for Magnetic Shielding
This item was removed from a university laboratory where it was surplus to requirements.
The chamber is constructed from mu-metal for the purpose of magnetic shielding. It is fitted with multiple external outlet flanges and a main top outlet flange, designed to accommodate a range of
connections and experimental configurations. The unit is mounted on a mobile frame with lockable castors for ease of movement.
It is in good cosmetic condition with minimal wear.
Includes:
- External outlet flanges with the following diameters:
- 24 × 7 cm
- 3 × 11 cm
- 5 × 15 cm
- 4 × 20 cm
- 1 × 25 cm
- Main/top outlet flange with 20 cm diameter
£ 6,000.00 (ex. VAT) 1 in stock
SS Vacuum Reaction Chamber with Multiple Ports, Shielded Cabinet & Canopy UHV
ITEM-42855
Shielded Stainless Steel Vacuum Chamber Assembly with Cabinet, Ports & Thermal Panels
This item was removed from a university lab where it was surplus to requirements.
Originally part of a bespoke physics-based laser experiment system, this assembly includes a floor-standing shielded cabinet, stainless steel vacuum chambers, and thermal shielding panels.
It is in reasonably good cosmetic condition.
Cabinet:
- Shielded floor-standing cabinet
- Lined with reflective thermal shielding
- Dimensions: 136cm (L) x 96cm (W) x 92cm (H)
- Condition: Fair
Vacuum Chambers & Fittings:
- Material: Stainless steel
- Dimensions: 100cm (L) x 73cm (W) x 66cm (H)
- Multiple flanged ports: 35mm to 300mm internal diameter
- Manufacturers: Vacuum Generators Ltd. and Omicrom
- Condition: Very good
Thermal Panels:
- 2 x 96cm x 68cm
- 1 x 128cm x 89cm
- 1 x L-shaped panel: 130cm x 128cm at widest
£ 5,000.00 (ex. VAT) 1 in stock
CTI Cryogenics Cryo Torr 8 High Vacuum Pump w/ 8001 Controller & SCW Compressor
ITEM-31681
CTI Cryogenics Cryo Torr 8 High Vacuum Pump w/ 8001 Controller & SCW Compressor
This was removed from a university lab where it was surplus to requirements.
The Cryo pump is in excellent cosmetic condition but the rest of the system is in good to reasonable condition. It was in full working order when last used.
The normal terms and conditions do not apply to this item. This item is non returnable and non refundable.
£ 5,000.00 (ex. VAT) 1 in stock
Large VacGen Vacuum Tank & Beam Tube with VAT Gate Valves
ITEM-38699
Large VacGen Vacuum Tank & Beam Tube with VAT Gate Valves.
This was removed from a university where it was surplus to requirements.
The lab confirmed that all the equipment is in excellent functional condition and has been housed in a clean room lab for the full lifetime.
Tank Dimensions: L 136cm x W 126cm x H 260cm.
Tank is fitted with 6 openings.
3 x 65cm x 65cm.
2 x 10cm x 10cm.
1 x 15cm x 15cm.
Beam Tube Dimensions: L 450cm x W 81cm x H 81cm.
Opening 65cm x 65cm.
2 x Gate Dimensions: L 100cm x W 24cm x H 183cm.
Opening 65cm x 65cm.
Fitted with SMC Solenoid valves Model: VF3143.
Three studs have been snapped off in one of the Gate valves.
£ 1,500.00 (ex. VAT) 1 in stock
MDC MFG INC 5 Port Stainless Steel Vacuum Chamber Lab
ITEM-41202
MDC MFG INC 5 Port Stainless Steel Vacuum Chamber Lab
This item was removed from a university where it was surplus to requirement.
It is in good cosmetic condition, we are unable to test it further at our facility.
This item features:
5 x Ports
- 4 x 3.8 Inch
- 1 x 1.5 inch
£ 500.00 (ex. VAT) 1 in stock
Vacuum Generators LTD (UHV) Valve & Turbo Molecular Chamber Lab
ITEM-41171
Vacuum Generators LTD (UHV) Valve & Turbo Molecular Chamber Lab
These items were removed from a university where they were surplus to requirement.
Both items are in good cosmetic condition, we cannot test them at our facility.
Items 1 to 9 of 9