Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab

This system was removed from a university lab where it was surplus to requirement.

The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.

It is in good cosmetic condition with all units included in good working order.

The system comprises the following components:

1. Thermo Vacuum Generators main reaction chamber

Serial No. CH0412005

1. 2 x Softshut gate units Part No. V10EA100

Serial Nos. SS0412002 SS0412003

1. Leybold Turbovac Pump Serial No. 30000045767
2. Pfeiffer Vacuum compact cold cathode gauge Type IKR261

BOC Edwards EXT75DX turbomolecular high vacuum pump

Serial No. 046074705

1. 3 x Luftkuelung pump cooling fans
2. 3 x Vulcatherm V1 1000W heaters
3. 2 x Elstein FSR 1000W heaters
4. RHC Vacuum Generators ZRHC substrate heater controller

Serial No. RC0407002

1. Turbotronik NT20 and NT10 analysis chamber and load lock control unit

Serial No. 30000050971

1. Thermo Electron AML pressure gauge controller

Serial No. 0006

1. Thermo Electron 8558 argon etch gun controller

Serial No. G117

1. Hiden Analytical ion gun turbo interface
2. Pfeiffer ion gas gun gauge
3. Power breaker circuit box
4. Leybold vacuum pump Type D16B serial No. 30000044357
5. Edwards vacuum pump E2M1 serial No. 046078290
6. Leybold vacuum pump type S1.5 serial No. 20900831099

Additional parts:

1. 2 x 16 amp cartridge fuses
2. 14 x 2 amp cartridge fuses
3. 1 x filament for ion gauge DC7033AA
4. 2 x air 1/4" tee pieces
5. 1 x pfeiffer seal for ion gun BN846241-T
6. 4 x resistor filaments
7. 1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x

Operating and instruction manuals:

1. Thermo EX03 Ion Gun System
2. Thermo High Pressure Gas Cell
3. Arun Microelectronics Pressure Gauge Controller Interface
4. Pfeiffer Vacuum TPG261
5. Varian MidiVac Controller 929-x
6. Varian Sublimation Controller 929-x
7. Leybold Turbovac
8. Leybold turbotronik NT20 - NT10
9. Eurotherm 2132 and 2166 PID Temperature Controllers

Large VacGen Vacuum Tank & Beam Tube with VAT Gate Valves.

This was removed from a university where it was surplus to requirements.

The lab confirmed that all the equipment is in excellent functional condition and has been housed in a clean room lab for the full lifetime.

Tank Dimensions: L 136cm x W 126cm x H 260cm.

Tank is fitted with 6 openings.

3 x 65cm x 65cm.

2 x 10cm x 10cm.

1 x 15cm x 15cm.

Beam Tube Dimensions: L 450cm x W 81cm x H 81cm.

Opening 65cm x 65cm.

2 x Gate Dimensions: L 100cm x W 24cm x H 183cm.

Opening 65cm x 65cm.

Fitted with SMC Solenoid valves Model: VF3143.

Three studs have been snapped off in one of the Gate valves.

This item is new in stock. Please enquire for further details.

CTI Cryogenics Cryo Torr 8 High Vacuum Pump w/ 8001 Controller & SCW Compressor

This was removed from a university lab where it was surplus to requirements.

The Cryo pump is in excellent cosmetic condition but the rest of the system is in good to reasonable condition. It was in full working order when last used.

This item is new in stock. Please enquire for further details.

This item is new in stock. Please enquire for further details.