Oxford Instruments Plasmalab 80 Plus ICP Reactive Ion Etcher

This item was removed from a university laboratory where it was surplus to requirements.

The system is in good cosmetic condition, however it has not been tested at our facility due to RF radiation safety restrictions at our site.

The included PC fails to stay powered on, shutting down within 5 seconds of being turned on, which prevents further system checks.

The previous client has notified us of the following two faults;

They mentioned two specific issues with the system:

1. RF Generator Malfunction: One of the RF generators is not functioning, restricting the system's use to only Reactive Ion Etching (RIE). There was a repair quote for £1500 from the manufacturer, but it was not pursued.

1. Nitrogen Purge Valve Removal: The nitrogen purge valve was removed from the turbo pump and used as a replacement for a failed valve on another system, the Plasmalab 100. This alteration has likely affected the system's functionality.

Due to the faults highlighted by the previous client, this system is listed as Spares/Repair.

Also Included;

• 2 x Advanced Energy RF Power Supply - RFX600A.

• HP Vectra VE PC w/ Keyboard & Mouse.