Oxford Instruments Plasmalab 80 Plus ICP Reactive Ion Etcher Lab
Item Code: ITEM-46250
Condition: Spares or Repairs
Brand: Oxford Instruments
NOTE - THIS IS A SPARES/REPAIRS ITEM
£ 5,000.00 exc. VAT (£ 6,000.00 inc. VAT)
If you are interested in this item or would like to place an order, please get in touch with us at , or by phone on +44 29 2086 4661.
Description
Oxford Instruments Plasmalab 80 Plus ICP Reactive Ion Etcher
This item was removed from a university laboratory where it was surplus to requirements.
The system is in good cosmetic condition, however it has not been tested at our facility due to RF radiation safety restrictions at our site.
The included PC fails to stay powered on, shutting down within 5 seconds of being turned on, which prevents further system checks.
The previous client has notified us of the following two faults;
They mentioned two specific issues with the system:
- RF Generator Malfunction: One of the RF generators is not functioning, restricting the system's use to only Reactive Ion Etching (RIE). There was a repair quote for £1500 from the manufacturer, but it was not pursued.
- Nitrogen Purge Valve Removal: The nitrogen purge valve was removed from the turbo pump and used as a replacement for a failed valve on another system, the Plasmalab 100. This alteration has likely affected the system's functionality.
Due to the faults highlighted by the previous client, this system is listed as Spares/Repair.
Also Included;
- 2 x Advanced Energy RF Power Supply - RFX600A.
- HP Vectra VE PC w/ Keyboard & Mouse.
Item Details
| Property | Value | Tested value |
|---|---|---|
| Electrical Supply | N/A | 3-Phase |
| Plug Included (3-Phase) | N/A | No plug included |
| PAT Test Result | N/A | Pass |
| PAT Test Date | N/A | 07-01-2025 |
| Year of Manufacture | N/A | N/A |
| Last Service Date | N/A | N/A |
Delivery
Free shipping is not available on this product. This item will be shipped by pallet delivery. Please contact us for a domestic or overseas shipping quote.
Additional terms and conditions
These items are for spares/repair only, may be defective/unsafe, and are not intended for use.
Return policy
Buy with confidence. If you wish to return the item, for whatever reason, you may do so within 45 days subject to our terms and conditions. International buyers will have to pay return shipping.
NOTE: No cables, remotes, accessories, power supplies, consumables or any other items are included unless shown in the item photos or detailed above.