This item is being sold on behalf of one of our clients and is not held in our own stock.

Please enquire with us if you would like to buy this item as shipping, warranty and the terms and conditions of sale will be dependent on the client's needs.

Vacuum Deposition / CVD System – Multi-Component High-Vacuum Processing Assembly

This system is sold on behalf of a client where it is no longer required.

The equipment consists of a complete vacuum deposition / CVD assembly with associated control electronics, vacuum components, high-vacuum pumps, RF power supplies, actuators, and sensors. The frame was originally manufactured in 1998 and was extensively retrofitted in 2011 with updated components. According to system logs, the last use was in 2021.

The system is offered as-is / for parts / repair, as the machine has not been fully powered or tested. Only the control cabinet has been energised. The system was not fully connected and lacked a password, preventing further testing or verification of safety compliance.

The system comprises the following major components:

Vacuum & Pumping Components

• ALCATEL / ADIXEN / PFEIFFER ATH 1300M turbo pump
• 2× Leybold Vacuum CTR 90 CERAVAC
• PFEIFFER IKR 251 compact cold cathode gauge
• VAT 26432-KA41-0001/0319 vacuum angle valve
• Additional large VAT vacuum valve
• Large high-vacuum valve assembly
• Gas Handling, Actuation & Process Hardware
• Actuation System THC-8AWDS linear actuator (400 mm travel)
• Various sensors, including pressure, temperature and switching sensors
• Various actuators including solenoid valves and heating elements
• CVD frame (original SP-500, retrofitted 2011)
• Mass flow control cabinet (included)

Safety & Process Protection

• 4× PROTEGO 42 DZ/T-40 pressure/vacuum relief valves
• 4× In-line detonation flame arresters DA-G-1 1/2"-IIC-P1.6
• RF & Power Delivery
• RF DRESSLER – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
• RFPP RF10S unit
• Advanced Energy MDX 500 magnetron drive (non-functional – does not turn on)
• RF Power AM-5 7600001010, 500 W, 13.56 MHz
• TDK Lambda power supply

Control Unit & Electronics

• ALCATEL / ADIXEN / PFEIFFER ACT 1300M controller
• MKS Type 252C-1-VPO exhaust valve controller
• MKS Type 152 automatic pressure controller
• MKS Type 600 automatic pressure controller
• MKS Type 2708
• 19″ rack-mount PC (no password for the control software)

Accessories & Included Items

• Connected cabling and installed modules
• Control cabinet with mass flow system
• Various sensors and actuators integrated into the frame

The seller can package the system securely for transport, requiring approximately one week to prepare, with an additional charge. Customer courier collection is also acceptable.

The system is available for collection from Gevrey-Chambertin, France.