PVD Products Inc. Titan Magnetron Deposition System w/ Software Lab

This system was removed from a university where it was surplus to requirement.

All units power up and are in good cosmetic condition, we are unable to test the system at our facility.

The client stated the following prior to collection: "They were working before shut down. The Magnetron chamber has some corrosion on it so will need cleaning up."

Software installed on PC:

187 Sputter

IMS Terminal

SQM-169 Comm

The system consists of the following:

PVD Products, Inc. Sputter Deposition System

Model: Project 187

Serial#: J00S2053

This unit powers up without apparent fault and cannot be tested further at our facility.

Specifications:

Maximum substrate size: 1 cm square samples

Maximum substrate temperature: 850C (in oxygen or other gas)

Operating_Pressure Range: 1 to 250 mTorr in Ar/O2/N2 gas or mix

Sputter Sources: Three (3) 2-inch diameter magnetron sputter sources

Source Orientations: Sputter down configuration

Power Supplies: One 300 Watt RF supply with matching network, two 400 W DC

supplies

Base Pressure of the Main Chamber: P < 5 x 10-7 Torr guaranteed

Chamber inside dimensions:

D38xW38xH43cm

Seren Industrial Power System

Model: AT3

Mfd: 2010

Serial#: AT3-0801

Pfeiffer Vacuum

Model: TC 110

Serial#: 79566865

Agilent TriScroll PTS03001UNIV BLUFFTON Dry Vacuum Pump

Model: 1201006408

Ref: S4743001

This item is in good cosmetic condition.

Powers up with no fault.

Manitou Systems Inc

Model: MTK-600L

Serial#: 202338

NFICON SQM-160 Multi-Film Rate/Thickness Monitor

Model: SQM-160

VAT PM-5 Adaptive Pressure Controller

Model: PM-5

SEREN MC2 Automatic Matching Network Controller

Model: MC2

SEREN R301 Radio Frequency Power Supply

Model: R301

Dell Laptop with Relevant Software

Software installed:

187 Sputter

IMS Terminal

SQM-169 Comm

Manuals:

Anaerobic And/Or Dry glovebox System Operation and Maintenance Manual

PVD Products, Inc.

Sputter Deposition System

Project 187

Operation and Service

Instruction Manual

XDS Dry Pup

Installation, Operating Maintenance Instructions

Series 264, DN 10 50 (I.D. 18e -2")

Series 265, DN 16-50 (1.D 5/8"- 2")

InstruTech, Inc.

Miniature lonization Vacuum Gauge

With Dual Convection

IGM-402 Module

The "Hornet"

User's Manual

mks

CE Declaration of Conformity

Model RЗOIMKII

Radio Frequency Power Supply

Test Data Sheet

G1010 Mark 2

Oxygen Analyser

Instruction Manual

130-0116 Issue 6

Additional parts/accessories:

INFICON

008-009-G10

6 MHz

SILVER COATED CRYSTALS

64724-0943

INFICON

750-1000-G10

6 MHZ

GOLD COATED CRYSTALSS

#69

65285-0944

Various other unknown parts all shown at end of slide.