Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab

Item Code: ITEM-41952

Condition: Used

Brand: Thermo Scientific

£ 30,000.00 exc. VAT (£ 36,000.00 inc. VAT)
1 in stock
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Description

Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab


This system was removed from a university lab where it was surplus to requirement.


The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.

It is in good cosmetic condition with all units included in good working order.


The system comprises the following components:


  • Thermo Vacuum Generators main reaction chamber

Serial No. CH0412005

  • 2 x Softshut gate units Part No. V10EA100

Serial Nos. SS0412002 SS0412003

  • Leybold Turbovac Pump Serial No. 30000045767
  • Pfeiffer Vacuum compact cold cathode gauge Type IKR261

BOC Edwards EXT75DX turbomolecular high vacuum pump

Serial No. 046074705

  • 3 x Luftkuelung pump cooling fans
  • 3 x Vulcatherm V1 1000W heaters
  • 2 x Elstein FSR 1000W heaters
  • RHC Vacuum Generators ZRHC substrate heater controller

Serial No. RC0407002

  • Turbotronik NT20 and NT10 analysis chamber and load lock control unit

Serial No. 30000050971

  • Thermo Electron AML pressure gauge controller

Serial No. 0006

  • Thermo Electron 8558 argon etch gun controller

Serial No. G117

  • Hiden Analytical ion gun turbo interface
  • Pfeiffer ion gas gun gauge
  • Power breaker circuit box
  • Leybold vacuum pump Type D16B serial No. 30000044357
  • Edwards vacuum pump E2M1 serial No. 046078290
  • Leybold vacuum pump type S1.5 serial No. 20900831099

Additional parts:


  • 2 x 16 amp cartridge fuses
  • 14 x 2 amp cartridge fuses
  • 1 x filament for ion gauge DC7033AA
  • 2 x air 1/4" tee pieces
  • 1 x pfeiffer seal for ion gun BN846241-T
  • 4 x resistor filaments
  • 1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x

Operating and instruction manuals:


  • Thermo EX03 Ion Gun System
  • Thermo High Pressure Gas Cell
  • Arun Microelectronics Pressure Gauge Controller Interface
  • Pfeiffer Vacuum TPG261
  • Varian MidiVac Controller 929-x
  • Varian Sublimation Controller 929-x
  • Leybold Turbovac
  • Leybold turbotronik NT20 - NT10
  • Eurotherm 2132 and 2166 PID Temperature Controllers

Item Details

Property Value Tested value
Year of Manufacture N/A 2004
Delivery

For collection only. Collections must be during our working hours (08:00-16:30 Monday to Friday). If you require packing and palletising for your collection, please contact us in advance for a price.

Return policy

Buy with confidence. If you wish to return the item, for whatever reason, you may do so within 45 days subject to our terms and conditions. International buyers will have to pay return shipping.

NOTE: No cables, remotes, accessories, power supplies, consumables or any other items are included unless shown in the item photos or detailed above.