Ultra-High Vacuum (UHV) Equipment

SPARES/REPAIR ITEM

£ 20,000.00 (ex. VAT) 1 in stock

Vacuum Deposition / CVD System – Multi-Component High-Vacuum Processing Assembly

ITEM-50636

Vacuum Deposition / CVD System – Multi-Component High-Vacuum Processing Assembly

This system is sold on behalf of a client where it is no longer required.

The equipment consists of a complete vacuum deposition / CVD assembly with associated control electronics, vacuum components, high-vacuum pumps, RF power supplies, actuators, and sensors. The frame was originally manufactured in 1998 and was extensively retrofitted in 2011 with updated components. According to system logs, the last use was in 2021.

The system is offered as-is / for parts / repair, as the machine has not been fully powered or tested. Only the control cabinet has been energised. The system was not fully connected and lacked a password, preventing further testing or verification of safety compliance.

The system comprises the following major components:

Vacuum & Pumping Components

ALCATEL / ADIXEN / PFEIFFER ATH 1300M turbo pump
2× Leybold Vacuum CTR 90 CERAVAC
PFEIFFER IKR 251 compact cold cathode gauge
VAT 26432-KA41-0001/0319 vacuum angle valve
Additional large VAT vacuum valve
Large high-vacuum valve assembly
Gas Handling, Actuation & Process Hardware
Actuation System THC-8AWDS linear actuator (400 mm travel)
Various sensors, including pressure, temperature and switching sensors
Various actuators including solenoid valves and heating elements
CVD frame (original SP-500, retrofitted 2011)
Mass flow control cabinet (included)

Safety & Process Protection

4× PROTEGO 42 DZ/T-40 pressure/vacuum relief valves
4× In-line detonation flame arresters DA-G-1 1/2"-IIC-P1.6
RF & Power Delivery
RF DRESSLER – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
RFPP RF10S unit
Advanced Energy MDX 500 magnetron drive (non-functional – does not turn on)
RF Power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda power supply

Control Unit & Electronics

ALCATEL / ADIXEN / PFEIFFER ACT 1300M controller
MKS Type 252C-1-VPO exhaust valve controller
MKS Type 152 automatic pressure controller
MKS Type 600 automatic pressure controller
MKS Type 2708
19″ rack-mount PC (no password for the control software)

Accessories & Included Items

Connected cabling and installed modules
Control cabinet with mass flow system
Various sensors and actuators integrated into the frame

The seller can package the system securely for transport, requiring approximately one week to prepare, with an additional charge. Customer courier collection is also acceptable.

The system is available for collection from Gevrey-Chambertin, France.

£ 18,000.00 (ex. VAT) 1 in stock

Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab

ITEM-41952

Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab

This system was removed from a university lab where it was surplus to requirement.

The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.

It is in good cosmetic condition with all units included in good working order.

The system comprises the following components:

Thermo Vacuum Generators main reaction chamber

Serial No. CH0412005

2 x Softshut gate units Part No. V10EA100

Serial Nos. SS0412002 SS0412003

Leybold Turbovac Pump Serial No. 30000045767
Pfeiffer Vacuum compact cold cathode gauge Type IKR261

BOC Edwards EXT75DX turbomolecular high vacuum pump

Serial No. 046074705

3 x Luftkuelung pump cooling fans
3 x Vulcatherm V1 1000W heaters
2 x Elstein FSR 1000W heaters
RHC Vacuum Generators ZRHC substrate heater controller

Serial No. RC0407002

Turbotronik NT20 and NT10 analysis chamber and load lock control unit

Serial No. 30000050971

Thermo Electron AML pressure gauge controller

Serial No. 0006

Thermo Electron 8558 argon etch gun controller

Serial No. G117

Hiden Analytical ion gun turbo interface
Pfeiffer ion gas gun gauge
Power breaker circuit box
Leybold vacuum pump Type D16B serial No. 30000044357
Edwards vacuum pump E2M1 serial No. 046078290
Leybold vacuum pump type S1.5 serial No. 20900831099

Additional parts:

2 x 16 amp cartridge fuses
14 x 2 amp cartridge fuses
1 x filament for ion gauge DC7033AA
2 x air 1/4" tee pieces
1 x pfeiffer seal for ion gun BN846241-T
4 x resistor filaments
1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x

Operating and instruction manuals:

Thermo EX03 Ion Gun System
Thermo High Pressure Gas Cell
Arun Microelectronics Pressure Gauge Controller Interface
Pfeiffer Vacuum TPG261
Varian MidiVac Controller 929-x
Varian Sublimation Controller 929-x
Leybold Turbovac
Leybold turbotronik NT20 - NT10
Eurotherm 2132 and 2166 PID Temperature Controllers

£ 12,000.00 (ex. VAT) 1 in stock

Edwards Auto 306 Thermal Evaporator Coating System Lab

ITEM-39970

Edwards Auto 306 Thermal Evaporator Coating System

This was removed from a university lab where it was surplus to requirements.

The unit powers up but has not been tested further. The system boots up and the internal pump runs.

Item contains:

Edwards RV12 Pump

Serial#: 006774738

Edwards Oil Mist Filter EMF10

Code#: A223 04 198

Edwards PV25EKA

Serial#: 006693767

Edwards B3060424A

Serial#: 006739951

£ 7,500.00 (ex. VAT) 1 in stock

Large Mu-Metal Multi-Port Vacuum Chamber for Magnetic Shielding

ITEM-47661

Large Mu-Metal Multi-Port Vacuum Chamber for Magnetic Shielding

This item was removed from a university laboratory where it was surplus to requirements.

The chamber is constructed from mu-metal for the purpose of magnetic shielding. It is fitted with multiple external outlet flanges and a main top outlet flange, designed to accommodate a range of

connections and experimental configurations. The unit is mounted on a mobile frame with lockable castors for ease of movement.

It is in good cosmetic condition with minimal wear.

Includes:

External outlet flanges with the following diameters:
24 × 7 cm
3 × 11 cm
5 × 15 cm
4 × 20 cm
1 × 25 cm

Main/top outlet flange with 20 cm diameter

£ 6,000.00 (ex. VAT) 1 in stock

SS Vacuum Reaction Chamber with Multiple Ports, Shielded Cabinet & Canopy UHV

ITEM-42855

Shielded Stainless Steel Vacuum Chamber Assembly with Cabinet, Ports & Thermal Panels

This item was removed from a university lab where it was surplus to requirements.

Originally part of a bespoke physics-based laser experiment system, this assembly includes a floor-standing shielded cabinet, stainless steel vacuum chambers, and thermal shielding panels.

It is in reasonably good cosmetic condition.

Cabinet:

Shielded floor-standing cabinet
Lined with reflective thermal shielding
Dimensions: 136cm (L) x 96cm (W) x 92cm (H)
Condition: Fair

Vacuum Chambers & Fittings:

Material: Stainless steel
Dimensions: 100cm (L) x 73cm (W) x 66cm (H)
Multiple flanged ports: 35mm to 300mm internal diameter
Manufacturers: Vacuum Generators Ltd. and Omicrom
Condition: Very good

Thermal Panels:

2 x 96cm x 68cm
1 x 128cm x 89cm
1 x L-shaped panel: 130cm x 128cm at widest

£ 5,000.00 (ex. VAT) 1 in stock

CTI Cryogenics Cryo Torr 8 High Vacuum Pump w/ 8001 Controller & SCW Compressor

ITEM-31681

CTI Cryogenics Cryo Torr 8 High Vacuum Pump w/ 8001 Controller & SCW Compressor

This was removed from a university lab where it was surplus to requirements.

The Cryo pump is in excellent cosmetic condition but the rest of the system is in good to reasonable condition. It was in full working order when last used.

The normal terms and conditions do not apply to this item. This item is non returnable and non refundable.

£ 5,000.00 (ex. VAT) 1 in stock

Large VacGen Vacuum Tank & Beam Tube with VAT Gate Valves

ITEM-38699

Large VacGen Vacuum Tank & Beam Tube with VAT Gate Valves.

This was removed from a university where it was surplus to requirements.

The lab confirmed that all the equipment is in excellent functional condition and has been housed in a clean room lab for the full lifetime.

Tank Dimensions: L 136cm x W 126cm x H 260cm.

Tank is fitted with 6 openings.

3 x 65cm x 65cm.

2 x 10cm x 10cm.

1 x 15cm x 15cm.

Beam Tube Dimensions: L 450cm x W 81cm x H 81cm.

Opening 65cm x 65cm.

2 x Gate Dimensions: L 100cm x W 24cm x H 183cm.

Opening 65cm x 65cm.

Fitted with SMC Solenoid valves Model: VF3143.

Three studs have been snapped off in one of the Gate valves.

£ 1,500.00 (ex. VAT) 1 in stock

MDC MFG INC 5 Port Stainless Steel Vacuum Chamber Lab

ITEM-41202

MDC MFG INC 5 Port Stainless Steel Vacuum Chamber Lab

This item was removed from a university where it was surplus to requirement.

It is in good cosmetic condition, we are unable to test it further at our facility.

This item features:

5 x Ports

4 x 3.8 Inch
1 x 1.5 inch

£ 1,000.00 (ex. VAT) 1 in stock

VAT 19490 UHV Gate Valve

ITEM-26077

VAT 19490 UHV Gate Valve

This was removed from a university lab where it was surplus to requirements.

The unit has not been tested but is in good cosmetic condition with minor marks.

£ 1,000.00 (ex. VAT) 1 in stock

MDC Vacuum E-GV-2500M Precision Gate Valve Lab

ITEM-41343

MDC Vacuum E-GV-2500M Precision Gate Valve

This item was removed from a university where it was surplus to requirement.

It is in good cosmetic condition with mechanical elements in good working order, we are unable to test it further at our facility.

£ 500.00 (ex. VAT) 1 in stock

Vacuum Generators LTD (UHV) Valve & Turbo Molecular Chamber Lab

ITEM-41171

Vacuum Generators LTD (UHV) Valve & Turbo Molecular Chamber Lab

These items were removed from a university where they were surplus to requirement.

Both items are in good cosmetic condition, we cannot test them at our facility.

£ 400.00 (ex. VAT) 1 in stock

Oxford Applied Research DC25 Ion Source Supply Neutraliser & Extractor Supply

ITEM-11585

These units were removed from a university lab as surplus to requirements.

We have not tested them at our site as we do not have the necessary power supply cable, but the lab manager believed these were working when last used so they are presumed to be functional.

1x Oxford Applied Research DC25 Ion Source Supply

1x Oxford Applied Research DC Ion Source Neutraliser & Extractor Supply

£ 350.00 (ex. VAT) 1 in stock

Severn Instruments PCV-3000 Gate Control Valve

ITEM-24361

Severn Instruments PCV-3000 Gate Control Valve

This was removed from a university lab where it was surplus to requirements.

The unit has not been tested.

It is in reasonable cosmetic condition but has lots of marks from age and use.

£ POA 1 in stock

HVA Gate Valve (DN160CF, Model 11120-0604) For UHV System Lab

ITEM-31680

HVA Gate Valve (DN160CF, Model 11120-0604) For UHV System

This is being sold on behalf of a client. It is surplus to requirements.

The unit is in good working order and good cosmetic condition with only minor marks from use.

The normal terms and conditions do not apply to this item. This item is non returnable and non refundable.