DCA Instruments UHV Cluster Tool / MBE Growth, Linear Sputtering, Pre-Clean, Load Lock & Wafer Transfer System

This system is offered for sale on behalf of a client as surplus to requirements.

The system was originally supplied by DCA Instruments to the University of Southampton in 2014 and has been used and maintained on site until Autumn 2022. It was reportedly in working order when switched off, and was restarted in July 2024 to assess its condition, with all items found to be working at that time.

The system is a complete UHV cluster tool configured for automated wafer transfer between multiple deposition, cleaning, storage and loading chambers. It is designed to handle wafer sizes up to 6” / 150 mm diameter and comprises two MBE growth chambers, one linear sputtering chamber, one pre-cleaning chamber, one central distribution chamber, one storage chamber and one cassette load lock.

The system can be offered as a complete package or split into individual sections, subject to agreement.

Guide Pricing

Whole system: £150,000

Deposition chambers M800: £50,000 each

Sputterer: £50,000

Cleaning chamber: £20,000

Load lock, CDC and storage: £10,000

The system is offered in as-seen condition. Disassembly, packing, insurance and transport will require suitable planning and specialist handling. The University of Southampton has indicated that it can offer support to enable the activities required for removal of the tool, together with logistical support.

System Overview

The complete system consists of:

2 x MBE growth chambers

1 x UHV linear sputtering chamber

1 x pre-cleaning chamber

1 x central distribution chamber / CDC

1 x UHV storage chamber

1 x cassette load lock

UHV cluster tool wafer transfer system

Electronics racks, control panels and associated control equipment

Bakeout systems

Additional spares package

The chambers are connected via a UHV cluster tool arrangement providing automatic wafer transfer between the process chambers.

The MBE growth chambers are identical vertical 800 mm ID chambers, each configured with ports for effusion cells, e-guns, an RF plasma atom source and RHEED. The sputtering chamber is a UHV linear sputtering system fitted with four rectangular magnetrons for sequential deposition. The pre-cleaning chamber provides high-temperature substrate annealing and argon ion etching via a Kaufman-type broad beam ion source. The UHV storage chamber allows storage of up to 10 substrates or masks under UHV conditions.

Included Main System Sections

1. MBE Growth Chambers

Two identical M800 UHV MBE growth chambers are included.

Each growth chamber is a vertical 800 mm ID chamber designed for 6” wafers, with deposition uniformity stated as better than ±1.5% over the wafer area.

Each chamber includes:

4 x ports for effusion cells or other sources

4 x base ports for e-guns

Large-area LN2 cryopanel surrounding the substrate area

Water cooling panel above the e-gun positions

Vacuum Barrier Corporation / VBC type LN2 feedthroughs

Horizontally mounted linear shutters for effusion cells and e-guns

Substrate loading port

RHEED screen and RHEED gun ports

Quartz monitor ports

Pyrometer port

RGA port

Video camera port

Viewports and spare ports

Each growth chamber includes the following accessories:

1 x NW150CF viewport with viewport shutter

1 x Convectron gauge head connected to rough pumping line

4 x NW63CF viewports, three with shutters

Growth Chamber Pumping & Gauging

Each growth chamber is equipped with a high-capacity turbo pumping system including:

1 x Pfeiffer HiPace 1200 turbopump, 1250 l/s

1 x VAT NW200CF electro-pneumatic gate valve for turbo pump

1 x CTI-8 CryoTorr cryopump and compressor with helium lines

1 x temperature display for cryo cold head

1 x VAT NW200CF electro-pneumatic gate valve for cryo pump

2 x nude ion gauge heads

1 x Granville-Phillips 350 ion gauge controller with four set-points

Growth Chamber Substrate Manipulators

Each chamber includes a 6” substrate manipulator with high-temperature SiC heater element, heavy-duty Z-manipulator, magnetically coupled rotary drive, motorised rotation and Z-lift.

Specifications include:

Maximum substrate temperature: up to 920°C

Note: one growth chamber is equipped with a prototype heater element with lower resistance and is limited to approximately 700°C

Temperature uniformity: better than ±5°C at 600°C

Maximum oxygen pressure: 2 x 10⁻⁵ Torr at 800°C

Substrate rotation speed: up to 60 RPM

25 mm Z-drive travel with stepper motor control

Eurotherm PID temperature controller

3 kW DC power supply

Bakeable power and thermocouple cables

Safety interlock switches

Growth Chamber Sources & Deposition Hardware

Each growth chamber is equipped with:

3 x Telemark 100 cc UHV single pocket e-guns

4 x 155 cc dual filament effusion cells

4 x Eurotherm 3508 dual temperature controllers

4 x TDK-Lambda DC dual power supplies

1 x MAT60 RF plasma source for atomic oxygen/nitrogen

1 x 155 cc effusion cell mounting / reloading module

Source shutters for effusion cells and e-guns

Quartz rate monitoring system

Main substrate shutter

Effusion cells have a stated maximum continuous operating temperature of 1,400°C and include integral water-cooling shrouds.

2. UHV Linear Sputtering System

The sputtering chamber is a rectangular UHV chamber with four bottom-mounted magnetron positions. The substrate is moved linearly over the magnetrons for sequential deposition and scanning during deposition.

Sputtering Chamber Pumping & Gauging

Included with the sputtering chamber:

1 x Pfeiffer HiPace 1200 turbopump, 1250 l/s

1 x VAT NW200CF gate valve

1 x DCA UHV conductance control valve

1 x DCA valve controller

1 x nude ion gauge head

1 x Granville-Phillips 350 ion gauge controller

1 x MKS 100 mTorr full-scale Baratron with shut-off valve

Sputtering Chamber Substrate Manipulator

The sputtering chamber includes a substrate holder with motorised linear movement for accepting a 6” wafer and transporting it across the four deposition positions.

The heater stage allows heating up to 400°C and includes:

1 x SiC or foil filament heater element

1 x 1.5 kW DC power supply

1 x Eurotherm controller

1 x K-type thermocouple

Magnetrons & Power Supplies

The sputtering chamber includes:

4 x rectangular UHV magnetrons for 10” x 2” target size

1 x spare Advanced Energy rectangular UHV magnetron for 10” x 2” target size

4 x electro-pneumatic rotary shutters

1 x 3 kW DC power supply

1 x 1 kW RF power supply

4 x auto-tuning units

1 x RF/DC switch

Gas Manifold

The sputtering chamber gas manifold includes:

1 x 100 sccm MFC for argon

1 x 100 sccm MFC for oxygen

1 x 100 sccm MFC for third gas

3 x electro-pneumatic shut-off valves

1 x 4-channel MKS 146 controller

Sputtering Quartz Rate Monitor

The sputtering chamber includes:

4 x UHV quartz monitor heads

4 x electro-pneumatic shutters for the crystal

1 x quartz rate controller

3. Central Distribution Chamber / CDC

The CDC is a true UHV cluster tool wafer handler with magnetically coupled dual-axis wafer handling robot. It provides automated transfer between the process chambers.

Included:

1 x CDC chamber module with connection for up to six process chambers

1 x UHV wafer transfer robot with 6” end effector

5 x NW100CF viewports

5 x NW200CF electro-pneumatic gate valves

1 x 400 l/s ion pump

1 x titanium sublimation pump / TSP on NW200CF flange with water cooling panel

1 x nude ion gauge head

1 x Granville-Phillips 350 ion gauge controller

4. Cassette Load Lock

The cassette load lock allows loading of a cassette with up to 10 molybdenum substrate holders. It is turbo pumped and includes an internal heater stage for outgassing of cassette and substrates before transfer into the CDC chamber.

Included:

1 x vertical load lock chamber

1 x Viton-sealed quick access front-loading door

1 x 10-position platen loading cassette

1 x vent valve

1 x motorised vertical cassette Z-lift

1 x laser-based wafer position indicator

Molybdenum 6” wafer holders, exact quantity uncertain

1 x Pfeiffer HiPace 700 l/s turbopump

1 x NW150CF VAT electro-pneumatic gate valve

1 x nude ion gauge head

1 x Convectron gauge head

1 x Granville-Phillips 358 gauge controller

Internal Load Lock Heater

The internal load lock heater allows outgassing up to 200°C and includes:

1 x quartz lamp heater system

1 x temperature controller

1 x power supply

1 x timer

1 x vacuum interlock

5. Pre-Cleaning Chamber

The pre-cleaning chamber allows high-temperature outgassing of substrates and molybdenum holders before growth. It also includes a broad beam ion source for substrate surface cleaning and is separated from the CDC vacuum by a gate valve.

The chamber includes:

1 x UHV chamber with NW200CF connecting flange to CDC

1 x water-cooled chamber wall assembly

1 x high-temperature heater stage

1 x Eurotherm 3508 temperature controller

1 x DC power supply

1 x stainless steel support table

Ion Source

The ion source package includes:

1 x Kaufman-type broad beam ion source

1 x ion source power supply and controller

1 x 10 sccm mass flow controller for argon

1 x electro-pneumatic shut-off valve for argon supply

Pre-Clean Pumping & Gauging

Included:

1 x Pfeiffer HiPace 700 l/s turbopump

1 x Pfeiffer Adixen ACP 15 dry roots pump

1 x NW150CF VAT electro-pneumatic gate valve

1 x nude ion gauge head

1 x Granville-Phillips 350 ion gauge controller

6. Storage Chamber for Substrates & Masks

The storage chamber is used for substrate and/or mask storage under UHV. It is attached directly to the CDC chamber and shares the CDC vacuum.

Included:

1 x vertical storage chamber

1 x NW100CF viewport

1 x 10-position molybdenum holder / mask storage cassette

1 x motorised vertical cassette Z-lift

1 x laser-based platen position indicator

The chamber allows storage of up to 10 x 150 mm wafers. Contact masks can be loaded and removed in situ.

7. Bakeout Systems

The growth chambers, sputtering chamber, pre-clean chamber and CDC chamber have separate bakeout systems.

Included:

2 x flexible bakeout tents for growth chambers

1 x flexible bakeout tent for CDC chamber

1 x flexible bakeout tent for sputtering chamber

1 x flexible bakeout tent for pre-clean chamber

2 x movable bakeout heater units with forced air circulation

2 x K-type thermocouples

2 x temperature controllers

2 x timers

2 x vacuum interlocks

Separate heating jacket for the storage module

8. Electronics Racks & Control Equipment

The system includes the following control equipment:

5 x 19” rack mounting cabinets

5 x power distribution panels with circuit breakers

4 x emergency power off switches

3 x shutter and valve controller panels for manual operation

1 x interlock control panel with safety interlocks

1 x CDC controller with touchscreen control panel

Additional Spares Included

The following spares are included with the system:

1 x Pfeiffer HiPace 1200 turbomolecular pump, new

1 x SiC heating element for manipulators of growth or degas chambers, new

1 x Advanced Energy rectangular magnetron, 26532-LA Onyx UHV Standard Magnetron, new

Complete set of sputterer shields and clamps to allow continuous operation while one set is sent for cleaning

MAT60 spares package including:

2 x quartz discharge tubes

5 x quartz aperture plates

12 x alumina aperture plates with angled holes for optimised oxygen flux across 6” wafer

2 x spare tantalum shutters for e-guns

3 x spare tantalum shutters for K-cells

Condition

This system was used and maintained on site until Autumn 2022. It was reportedly still in working order when switched off and was restarted in July 2024 to assess its condition, with all items found to be working at that time.

The system is offered in as-seen condition. No further testing has been carried out by UniGreenScheme. Buyers are strongly advised to inspect the system and satisfy themselves as to its condition, configuration, completeness and suitability prior to purchase.

Due to the complexity, scale and specialist nature of the equipment, professional decommissioning, disassembly, packing, insurance and transportation will be required.

Removal, Logistics & Support

The system is located at the University of Southampton.

The University of Southampton has indicated that it can provide support to enable the activities required for removal of the tool, together with logistical support. Any removal, lifting, specialist contractor work, packing, insurance and transport costs are to be agreed separately.

Notes

This is a specialist UHV deposition and wafer-handling cluster tool and is suitable for experienced users with the appropriate facilities, infrastructure and technical capability to install, commission and operate the equipment.

Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab

This system was removed from a university lab where it was surplus to requirement.

The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.

It is in good cosmetic condition with all units included in good working order.

The system comprises the following components:

• Thermo Vacuum Generators main reaction chamber

Serial No. CH0412005

• 2 x Softshut gate units Part No. V10EA100

Serial Nos. SS0412002 SS0412003

• Leybold Turbovac Pump Serial No. 30000045767
• Pfeiffer Vacuum compact cold cathode gauge Type IKR261

BOC Edwards EXT75DX turbomolecular high vacuum pump

Serial No. 046074705

• 3 x Luftkuelung pump cooling fans
• 3 x Vulcatherm V1 1000W heaters
• 2 x Elstein FSR 1000W heaters
• RHC Vacuum Generators ZRHC substrate heater controller

Serial No. RC0407002

• Turbotronik NT20 and NT10 analysis chamber and load lock control unit

Serial No. 30000050971

• Thermo Electron AML pressure gauge controller

Serial No. 0006

• Thermo Electron 8558 argon etch gun controller

Serial No. G117

• Hiden Analytical ion gun turbo interface
• Pfeiffer ion gas gun gauge
• Power breaker circuit box
• Leybold vacuum pump Type D16B serial No. 30000044357
• Edwards vacuum pump E2M1 serial No. 046078290
• Leybold vacuum pump type S1.5 serial No. 20900831099

Additional parts:

• 2 x 16 amp cartridge fuses
• 14 x 2 amp cartridge fuses
• 1 x filament for ion gauge DC7033AA
• 2 x air 1/4" tee pieces
• 1 x pfeiffer seal for ion gun BN846241-T
• 4 x resistor filaments
• 1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x

Operating and instruction manuals:

• Thermo EX03 Ion Gun System
• Thermo High Pressure Gas Cell
• Arun Microelectronics Pressure Gauge Controller Interface
• Pfeiffer Vacuum TPG261
• Varian MidiVac Controller 929-x
• Varian Sublimation Controller 929-x
• Leybold Turbovac
• Leybold turbotronik NT20 - NT10
• Eurotherm 2132 and 2166 PID Temperature Controllers

Edwards Auto 306 Thermal Evaporator Coating System

This was removed from a university lab where it was surplus to requirements.

The unit powers up but has not been tested further. The system boots up and the internal pump runs.

Item contains:

Edwards RV12 Pump

Serial#: 006774738

Edwards Oil Mist Filter EMF10

Code#: A223 04 198

Edwards PV25EKA

Serial#: 006693767

Edwards B3060424A

Serial#: 006739951

Large Mu-Metal Multi-Port Vacuum Chamber for Magnetic Shielding

This item was removed from a university laboratory where it was surplus to requirements.

The chamber is constructed from mu-metal for the purpose of magnetic shielding. It is fitted with multiple external outlet flanges and a main top outlet flange, designed to accommodate a range of

connections and experimental configurations. The unit is mounted on a mobile frame with lockable castors for ease of movement.

It is in good cosmetic condition with minimal wear.

Includes:

• External outlet flanges with the following diameters:
• 24 × 7 cm
• 3 × 11 cm
• 5 × 15 cm
• 4 × 20 cm
• 1 × 25 cm

• Main/top outlet flange with 20 cm diameter

Shielded Stainless Steel Vacuum Chamber Assembly with Cabinet, Ports & Thermal Panels

This item was removed from a university lab where it was surplus to requirements.

Originally part of a bespoke physics-based laser experiment system, this assembly includes a floor-standing shielded cabinet, stainless steel vacuum chambers, and thermal shielding panels.

It is in reasonably good cosmetic condition.

Cabinet:

• Shielded floor-standing cabinet
• Lined with reflective thermal shielding
• Dimensions: 136cm (L) x 96cm (W) x 92cm (H)
• Condition: Fair

Vacuum Chambers & Fittings:

• Material: Stainless steel
• Dimensions: 100cm (L) x 73cm (W) x 66cm (H)
• Multiple flanged ports: 35mm to 300mm internal diameter
• Manufacturers: Vacuum Generators Ltd. and Omicrom
• Condition: Very good

Thermal Panels:

• 2 x 96cm x 68cm
• 1 x 128cm x 89cm
• 1 x L-shaped panel: 130cm x 128cm at widest

Stainless Steel Vacuum Chamber Assembly & Flanged CF/ISO Vacuum UHV

This lot was removed from a facility where it was surplus to requirement.

This lot comprises a collection of high-quality stainless steel vacuum components, including a large multi-port vacuum chamber body, multiple cylindrical sections, blanking plates, and various flanged fittings.

These components are typically used in high-vacuum or ultra-high vacuum (UHV) systems for applications such as thin film deposition, materials research, plasma systems, or particle physics experiments. The chamber features multiple ports for instrumentation, feedthroughs, and viewports, and appears to be manufactured to a high standard with precision-machined flanges.

Included Components:

• Large stainless steel multi-port vacuum chamber body
• Multiple cylindrical vacuum sections/extensions
• Assorted CF/ISO flanged ports and adapters
• Various blanking plates and flange covers
• Internal chamber fittings/components (as pictured)
• Selection of smaller flanges, seals, and fittings

VAT PM-5 Adaptive Pressure Controller UHV Lab

This item was removed from a facility where it was surplus to requirement.

It is in good cosmetic condition and powers on, we are unable to test it further at our facility.

Large VacGen Vacuum Tank & Beam Tube with VAT Gate Valves.

This was removed from a university where it was surplus to requirements.

The lab confirmed that all the equipment is in excellent functional condition and has been housed in a clean room lab for the full lifetime.

Tank Dimensions: L 136cm x W 126cm x H 260cm.

Tank is fitted with 6 openings.

3 x 65cm x 65cm.

2 x 10cm x 10cm.

1 x 15cm x 15cm.

Beam Tube Dimensions: L 450cm x W 81cm x H 81cm.

Opening 65cm x 65cm.

2 x Gate Dimensions: L 100cm x W 24cm x H 183cm.

Opening 65cm x 65cm.

Fitted with SMC Solenoid valves Model: VF3143.

Three studs have been snapped off in one of the Gate valves.

Hemispherical CF Vacuum Chamber 58 x 58 x 33 cm

This item was removed from a facility where it was surplus to requirement.

It is in good cosmetic condition and remains untested.

VAT High Vacuum Control Gate Valve & 84021-RI Motorised Actuator

This item was removed from a faciity where it was surplus to requirement.

It is in good cosmetic condition.

Ultra High Vacuum (UHV) Effusion Cell for Preparation

This item was removed from a facility where it was surplus to requirement.

It is in good cosmetic condition and remains untested.

VAT Series 121 Vacuum Gate Valve UHV

This item was removed from a facility where it was surplus to requirement.

It is in good cosmetic condition.

Includes;

• User Manual

Stainless Steel Vacuum Bellows - RS Components

This item was removed from a facility where it was surplus to requiremet.

It is in good cosmetic condition and remains untested.

MDC MFG Inc. Stainless Steel UHV Chamber – Tee Section with CF Flanges

This item was removed from a facility where it was surplus to requirements.

It is in good cosmetic condition. No further testing was possible.

This UHV tee-section is suitable for expanding or constructing modular high- and ultra-high-vacuum systems.

Construction & Features:

Heavy-wall stainless steel body

CF (ConFlat) high-vacuum flanges throughout

Tee-section configuration for system branching

Multiple large-diameter CF ports suitable for:

Pump connections

Chamber extensions

Instrumentation and diagnostic access

Vacuum Generators LTD (UHV) Valve & Turbo Molecular Chamber Lab

These items were removed from a university where they were surplus to requirement.

Both items are in good cosmetic condition, we cannot test them at our facility.

MDC MFG Inc. Stainless Steel Substrate Stage with Dual Stepper Motors

This item was removed from a facility where it was surplus to requirements.

It is in good cosmetic condition. The assembly consists of a high-precision rotary substrate drum designed for thin-film deposition, coating, and surface-treatment applications.

The stage features a large-format stainless-steel drum supported by precision bearings and driven by two stepper motors, one mounted at each end, allowing controlled and stable rotation. The unit has not been powered or functionally tested at our facility.

Construction & Features:

• Heavy-duty stainless-steel construction
• Large cylindrical drum with fine ribbing for improved heat transfer and mechanical stability
• Precision bearing support
• Dual stepper-motor drive for accurate rotational control
• Suitable for vacuum and UHV thin-film deposition systems

Stepper Motor Details (2 × fitted):

• Manufacturer / Series: PowerMax II
• Step Angle: 1.8°

Models:

• M22NRFC-LNN-NS-00
• M21NRFC-LNN-NS-00

• Current: 1.55 A / 1.75 A (Bipolar Series)
• Power: 70 W / 62 W
• Speed: Up to 1500 RPM

Temperature Rating:

• Motor: 90°C max
• Ambient: 40°C

MDC Vacuum E-GV-2500M Precision Gate Valve

This item was removed from a university where it was surplus to requirement.

It is in good cosmetic condition with mechanical elements in good working order, we are unable to test it further at our facility.

VAT 19490 UHV Gate Valve

This was removed from a university lab where it was surplus to requirements.

The unit has not been tested but is in good cosmetic condition with minor marks.

This item is new in stock. Please enquire for further details.