Search results for: optical table

BD Becton Dickinson LSR II Flow Cytometer

This was removed from a university lab where it was surplus to requirements.

The unit powers up but we were unable to test it further without a PC and software. The lab informed us when it was last used a few years ago, it was still working.

The unit is in overall good cosmetic condition with marks from use. There is a crack in the front and the right-hand cover and the left-hand door doesn't close fully.

2 x One AC

Model - CBS2120

PN - 011-526

SN - 0129 - 6308/0129-6304

Becton Dickinson Closed Waste Container

Alloy Products Corp 316L Waste Container (Lid doesn't fit)

SN - 115443-007

Table not included.

This item is new in stock. Please enquire for further details.

Zeiss Axioplan 2/LSM 5 Pascal Confocal Laser System

This system was removed from a university laboratory where it was surplus to requirements.

The Axioplan 2 microscope has been successfully controlled via the included Pascal software.

While the laser modules have not been fully tested, the software allows toggling of the laser control.

All components are in good used cosmetic condition.

The system comprises the following:

• Zeiss Axioplan 2ie MOT microscope stand, fitted with:
• Zeiss LSM 5 Pascal VarioTwo
• HBO 100 Mercury Lamp with ebq100 power supply
• 4 x Filter Cubes: DIC, DAPI, FITC, Rhod
• 2 x Zeiss 44 40 34 Pl 10x/25 Eyepieces
• Zeiss 1067-325 Axio Mechanical Rotating Stage
• Zeiss 1159-530 Condenser
• Zeiss 1058-431 Light Channel
• Zeiss 1095-490 Switching Mirror
• HAL 100 Halogen Lamp
• 6-position nosepiece with objectives:
• Zeiss Plan-NEOFLUAR 10x/0.3 ∞/0.17
• Zeiss Plan-NEOFLUAR 20x/0.50 ∞/0.17
• Zeiss Plan-NEOFLUAR 40x/1.3 Oil ∞/0.17
• Zeiss Plan-APOCHROMAT 63x/1.4 Oil Ph3 ∞/0.17

• Zeiss LSM 5 Pascal Laser Module, including:
• Lasos LGK 7786 P 543nm Laser (June 2011) with Lasos SAN 7460A power supply
• Lasos LGK 7812 ML04 450–530nm Laser (November 2014) with Lasos LGN 7812-01 power supply

• Zeiss LSM 5 Pascal Laser Module +, including:
• Lasos LGK 7628-1 633nm Laser (May 2002) with Lasos SAN 7460A power supply

• Computer & Software:
• Fujitsu Siemens Celsius PC with Windows XP (password removed), Pascal Software installed, and serial hardware dongle
• 2 x NEC monitors, keyboard & mouse
• AxioVision software CDs

• Zeiss Pascal 5 ECU Units:
• 1 x ECU tested and working with this system
• 1 x ECU marked 'DEAD 5v' (included untested as a spare)

• Spare PC:
• Fujitsu Siemens Celsius 670 (non-booting, Windows 2000) – included for spare parts

• Other:
• Isolation table is included
• Table pictured with lasers is not included

Agilent 2100 Bioanalyzer Product No. G2938C

This item was removed from a facility where it was surplus to requirement.

It is in good cosmetic condition and powers on, we are unable to test it further at our facility.

Includes;

• Agilent 2100 Bioanalyzer Expert Software CD
• Agilent 2100 Bioanalyzer Software & User Information booklet
• Agilent Software Kit (2x)
• Agilent Software Certificate & Registration Packet – 2100 Instrument Control License
• Agilent Software Certificate & Registration Packet – 2100 Electrophoresis License
• Agilent 5065-4413 Bayonet Electrode Cartridge
• Agilent Electrode/Diode Test Chip
• Agilent Antifouling Test Chip
• Agilent flow cell cartridge
• Agilent fuse
• Rephodyne fittings kit (P/N 5512780)
• Millipore spare fitting set
• IDEX / Upchurch Scientific fittings pack
• RedOpine optical discs
• Assorted Agilent capillary tubing coils
• Assorted clear laboratory tubing
• Assorted microfluidic connectors and ferrules
• Assorted compression fittings
• Assorted threaded couplers
• Bag of small black connector covers / caps
• Small Agilent labelled spare parts packet
• Additional loose fluid connectors and fittings pack

TEM Vacuum Chamber Parts – 60cm Diameter, 98cm Height on Aluminium Bench

This item was removed from a university lab where it was surplus to requirements.

This stainless steel vacuum chamber was previously used in an optical vacuum experiment. Due to the presence of a rubber seal, it is not suitable for applications requiring very low vacuum levels but remains a functional system for various laboratory uses.

Main Chamber Vessel:

• Material: Approx. 5mm gauge stainless steel
• Diameter: 60cm
• Height: 98cm
• Flange: 25mm gauge flange with O-ring seal for lid connection
• Side Port: 1 x flanged port, 35mm internal diameter
• Base Flange: 15cm diameter with 20 fixing holes around the periphery

Lid:

• Diameter: 71cm
• Fixings: 40 fixing holes around the periphery
• Ports: 13 x flanged ports, 35mm internal diameter

Heating Element:

• Heating strap wrapped around chamber body
• Danfoss heat controller (disconnected; untested)

Bench Stand:

• Frame: 38mm square-section aluminium
• Tabletop: 13mm aluminium plate
• Dimensions: 166cm (L) x 80cm (W)

• Heights: Two working levels – 74cm and 58cm
• Castors: 4 x castors, adjustable to lower bench securely onto the floor

Zeiss Axiovert 200M Confocal Microscope System with LSM510 META & Multi-Laser Setup

This system was removed from a university laboratory where it was surplus to requirements.

The previous owner confirmed it was in good working condition prior to removal, though advised there may be a potential laser-related issue.

The microscope and automated stage have been briefly tested and are functioning as expected, with test slide images successfully captured. Service records show the system was last serviced by Zeiss on 16/04/2014, where the switching mirror was replaced and META calibration completed, and it was reported as fully working at that time.

The system is in good used cosmetic condition with typical signs of general use. Further testing of the confocal and laser system has not been carried out.

The system comprises the following:

• Zeiss Axiovert 200M Confocal Microscope, fitted with:
• Zeiss HBO100 Light Source (447219) with EQB100 PSU
• Zeiss 1095-490 Switching Mirror
• Zeiss 1058-431 Light Channel
• Zeiss 1005-847 Condenser NA 0.55 WD 26mm
• Märzhäuser Scan 120x100 Automated Stage (90-25-414-0000) with inserts
• Zeiss 6 Position Nosepiece
• Zeiss 1005-827 Binocular Tube
• 2 x Zeiss 1016-758 W-PI 10x/23 Eyepieces

Objectives (Zeiss):

• Plan-NEOFLUAR 10x/0.30 ∞/0.17
• Plan-NEOFLUAR 20x/0.50 ∞/0.17
• EC Plan-NEOFLUAR 40x/1.3 Oil Ph3 ∞/0.17
• Plan-APOCHROMAT 63x/1.4 Oil DIC ∞/0.17
• A-Plan 10x/0.25 Ph1 ∞/-
• Plan-NEOFLUAR 40x/1.3 Oil DIC ∞/0.17

Laser Scanning & Illumination Components:

• Zeiss LSM510 META Scan Head
• Zeiss LSM 510 Laser Module including:
• Lasos LGK 7812 ML4 (450–530nm, May 2011)
• Lasos LGK 7628-1 (633nm, June 2012)
• Lasos LGK 7786 P (543nm, August 2009)
• Lasos LGN3000 Laser Power Supply
• Zeiss ECU
• Zeiss MCU 28 Stage Controller
• Zeiss Bedienpult/WIS XY Joystick Controller
• Zeiss Remote Control

Optics & Filter System:

• Zeiss 5 Position Motorised Reflector Turret (1064-365)
• Filter Set 10 BP450-490 FT510 BP515-565
• Filter Set 15 BP546/12 FT580 LP590
• Filter Set 49 G365 FT395 BP445/50
• Zeiss DIC/Senarmont (1005-863)
• 2 x Zeiss Iris Stop Sliders (one not functioning correctly)

Environmental Control:

• PeCon Inkubator XL-3 Enclosure (one thumb screw missing)
• Heating Unit with hose
• Tempcontrol 37-2 Digital
• CO₂ Controller

Computing & Software:

• Fujitsu Siemens Celsius PC (Windows 2000)
• Keyboard, monitor & mouse
• Carl Zeiss software installed with USB license dongle
• (Note: DVD/CD drive belts require replacement)

Additional:

• Various connection cables
• Manuals and software discs

Please note: The main table shown in images is not included, though a suitable alternative may be available separately.

This item is new in stock. Please enquire for further details.

Thermo Fisher Scientific Nicolet iS20 Mid-Infrared FT-IR Spectrometer with Heated 2m Gas Cell System

This equipment is being offered on behalf of a client, where it is now surplus to requirements.

The system comprises a Thermo Fisher Scientific Nicolet iS20 Mid-Infrared FT-IR Spectrometer together with a Nicolet 2 Meter Gas Cell, heating jacket, temperature controller and sample compartment extension kit, providing a complete analytical setup for advanced gas analysis and FT-IR spectroscopy applications.

The Nicolet iS20 is a high-performance Fourier Transform Infrared (FT-IR) spectrometer designed for high sensitivity mid-infrared analysis across research, chemical, pharmaceutical and materials science applications. The supplied gas cell configuration allows for heated gas analysis and long-path gas sampling workflows.

The client has advised the system is in good working order and significant service work was completed in 2024, including replacement of the light source, modulator, detector, communication board and optics within the SpecAC flow cell.

The interferometer, laser and light source remain under warranty until September 2034.

The client has advised they are able to package the equipment for transport if required.

Includes;

• Thermo Fisher Scientific Nicolet iS20 FT-IR Spectrometer
• iS10 Sample Compartment Extension Kit
• Nicolet 2 Meter Gas Cell with ZnSe Windows
• Nicolet FT-IR 2 Meter Gas Cell Heating Jacket (230V)
• Gas Cell Pressure Gauge
• USB Temperature Controller
• Some original packaging boxes

Normal terms and conditions do not apply to this item, which is non-returnable and non-refundable.

Olympus IX-70 Inverted Confocal Microscope System with LSR UltraVIEW Scanner Lab

This system was removed from a university laboratory where it was surplus to requirements.

The system powers on, and the basic microscope functions have been tested successfully. All units appear to operate as intended, including illumination and mechanical stage movement. Full operation likely requires a compatible PC running the appropriate control software for confocal and imaging functions.

The system consists of:

Olympus IX-70 Inverted Microscope fitted with:

• Olympus IX-ILL 100 LH Transmitted Illumination Column
• Uniblitz Shutter with VMM-D1 Shutter Driver
• Olympus IX-ADUCD UCD Adapter
• Olympus U-UCDB-2 Condenser
• Olympus IX-SFR Mechanical Stage
• Olympus 6 Position Nosepiece
• Olympus IX-RFAC Cube Turret fitted with 2 filter cubes:
• U-M41002B HQ:R/DII
• U-M41001 HQ:FITC
• Olympus U-BI90CT Binocular Tube 90CT
• Olympus WH10X-H/22 Eyepiece (appears to be missing outer ring)
• Olympus WH10X/22 Eyepiece
• Olympus U-ULS100H Halogen Lamp
• Olympus U-ULS100HG Mercury/Fluorescence Lamp with U-RFL-T Power Supply
• LSR UltraVIEW Confocal Scanner (not tested due to laser)
• Perkin Elmer 4100V-002 Ultra Pix Imaging System (not tested)
• Sutter Instruments Filter Wheel with Lambda 10-2 Controller
• PI E-662 LVPZT Amplifier/Servo with objective adapter
• Olympus PlanApo 60x/1.40 Oil ∞/0.17 objective (seized in adapter)

Included Objectives:

• Olympus UPlanApo 40x/1.00 Oil Iris ∞/-
• Olympus UPlanFl 20x/0.50 ∞/0.17

Additional components:

• 2 boxes containing various optical and mechanical spare parts

Olympus IX-70 // Fluoview FV-500 Confocal Microscope System

This system was removed from a university laboratory where it was surplus to requirements.

The system powers on, and the basic microscope functions have been tested successfully. All optical and mechanical components appear to operate as expected, with the system in good overall cosmetic condition, showing signs of general use. Full FV500 operation will require a compatible PC running the appropriate control software.

The system consists of:

Olympus IX-70 Inverted Microscope fitted with:

• Olympus IX-ILL 100 LH Transmitted Illumination Column
• Olympus IX-LWPO Polarizer
• Olympus IX-LWUCD Phase/DIC Condenser
• Olympus IX-SFR Mechanical Stage
• Olympus 6 Position Nosepiece
• Olympus FV5-DICT DIC Slider
• Olympus IX-AN Analyzer
• Olympus IX-RFAC Cube Turret fitted with 3 filter cubes:
• Olympus U-MNIBA2
• Olympus U-MWG2
• U-N41024 CY5 LP
• Olympus U-BI90 Binocular Tube 90
• Olympus WH10X-H/22 Eyepiece (appears to be missing outer ring)
• Olympus WH10X/22 Eyepiece
• Olympus Liquid Light Guide with LG-PS2 and FV5-TD
• Olympus U-ULS100HG Mercury/Fluorescence Lamp with U-RFL-T Power Supply
• Olympus FV5-74-2 Fluoview FV500 Controller (working condition unknown)
• Olympus FV5-ZM Scanning Head

Included Objectives:

• Olympus UPlanApo 10x/0.40 ∞/0.17
• Olympus UPlanApo 20x/0.70 ∞/0.17
• Olympus UPlanApo 40x/0.90 WLSM ∞/0.17
• Olympus UPlanApo 60x/1.40 Oil ∞/0.17
• Olympus UPlanApo 100x/1.35 Oil Iris ∞/0.17

Zeiss PALM MicroBeam System with Observer Z1, Cameras, PC & Software

This system was removed from a facility where it was surplus to requirement.

The Zeiss PALM MicroBeam system is a laser microdissection platform built around the Observer Z1 microscope, designed for precise sample isolation and imaging in advanced research applications.

The PC (Windows 7) is installed with AxioVision 4.8.3.0 and PALMRobo 4.6 Pro software. Both cameras were able to capture images, and the system responds to the joystick, touchscreen, and software controls. PALMRobo software initialises correctly and live slide images were visible.

Included:

Microscope & Core System:

• Zeiss Observer Z1 Microscope
• PALM MicroBeam System with RoboMover & Motorised Stage
• Motorised Condenser (NA 0.55 WD 26mm)
• Motorised 6 Position Filter Turret

Illumination:

• HAL100 Halogen Lamp
• HBO100 Mercury Lamp with ebq100 Power Supply

Cameras & Optics:

• Zeiss AxioCam MRm Camera
• Zeiss AxioCam Cc1 Camera
• Zeiss Binocular Tube
• 2 x Zeiss W-PI 10x/23 Eyepieces

Objectives:

• Zeiss FLUAR 5x/0.25
• Zeiss FLUAR 10x/0.50
• Zeiss LD Plan-NEOFLUAR 20x/0.4
• Zeiss LD Plan-NEOFLUAR 40x/0.6
• Zeiss LD Plan-NEOFLUAR 63x/0.75
• Zeiss EC Plan-NEOFLUAR 100x/1.3 Oil

Filters & Accessories:

• Multiple filter sets installed
• Analyzer slider with fitted filter

Control & Computing:

• Fujitsu PC (Windows 7) with AxioVision 4.8.3.0
• PALMRobo 4.6 Pro Software
• Zeiss ZEN 4.8.3 Software (boxed with dongle)
• Zeiss Controller
• Zeiss Touchscreen Control Pad
• Megatron Joystick
• Marquardt Footswitch

Additional Equipment:

• Interpower Power Strip with cables
• PALM DishHolders (35cc & 50cc)
• PALM Collector Sets (SingleTube II 200 & 500)
• PALM LiveCell Collector
• PALM Membrane Slides
• Stage insert slide holders
• User manuals
• All required cables

PerkinElmer Opera High Content Screening System w/ Software & Accessories

This system was removed from a facility where it was surplus to requirements.

The system is in good cosmetic condition with typical signs of laboratory use. All mechanical components appear intact and the internal mechanisms move freely. The unit has been cleaned externally, the rear cabling has been organised, and the two desk extensions on either side of the system have been fitted.

Due to the presence of Class IIIB and Class IV lasers, the system has not been powered on or PAT tested, as our facility is not equipped to safely test Class 3+ laser systems.

No further testing has been carried out.

Last Service: 2021

The system is supplied with an extensive range of accessories, documentation, and supporting equipment as detailed below.

General Accessories

• USHIO Xenon Short Arc Lamp
• Till Photonics Polychrome V Fibre Optic light source
• Black hard-shell carry case (for internal components such as objectives)
• Four heavy-duty black threaded handles (likely for moving or levelling the system)

IT / AV Accessories

• Large bundle of IEC power link cables
• 2 × VGA (D-Sub 15) cables
• 1 × Beige high-density Centronics-style cable
• 1 × Large rectangular multi-pin data cable
• 2 × USB A-to-B cables
• 1 × Coiled FireWire / proprietary data cable
• 1 × Split “Y” USB cable
• 2 × PC expansion slot brackets (USB and serial/parallel)
• 2 × Grey ribbon cables (IDE or similar)

Software, Media & Documentation

• Acapella High-Content Imaging and Analysis Software (boxed)
• PerkinElmer Opera Cell Image Analysis Cluster documentation
• PerkinElmer Opera System documentation binders
• Additional manuals and documentation including:
• Opera and Opera QEHS hardware manuals
• Opera Software 1.8.1 release notes
• Remote Cell Analyzer manual
• ImageView software manual
• Bernstein 5.1 software manual
• Site readiness instructions
• Quick guides and installation documentation
• Office computer installation guide
• Filter selection tool user manuals

Liquid Handling / Pin Tools

• 6 × Pin Tool Plates used for nanolitre-scale liquid transfer in high-throughput screening
• Mixed configurations including 96-pin and 384-pin style arrays

Rigaku X-ray Diffractometer (XRD) Ultima III

This system was removed from a university lab where it was surplus to requirements.

The system is in reasonable used cosmetic condition. It has not been powered on at our site due to our on-site risk assessments surrounded X-Rays.

The unit was working when put into storage in 2018.

Various components and parts are included as listed below, along with a PC setup, although no Rigaku software programs appear to be installed on the PC.

However, there are the following software disks included:

• Rigaku Basic Software (Cat No.: 9240J101)
• Rigaku TTRAX3 and Ultima3 Software (Cat No.: 9240J101)
• Rigaku Special Order Software (U30megaP) (Cat No.: 9999)

System Specifications:

• Model: Ultima III
• Cat No.: 2035M410
• Serial No.: DD3654N

• 6 Station Holder
• Model: SA-HEM3
• Cat No.: 4057J101
• Serial No.: 00563702

• Patlite Beacon
• Model: LMS-L (SN-06X03M)

• Rigaku DC Motor Controller
• SN: DD12866

• Rigaku Long Fine Focus
• Type: R01-29-0202
• NC: 9430 022 73201
• No. DK 402688

• Rigaku CBO Cross Beam Optics
• Cat No.: 2220B101
• SN: DD12793

• Additional Rigaku parts:

• Cat No.: 5738E402 (SN-DD061813)
• Cat No.: 2155G101 (SN-DD12804)
• Cat No.: 4601K831 (SN-DD12154)
• Cat No.: 4253A101 (SN-DD11586

• Vexta Stopping Motor
• Model: PK543-A
• SN: UR70J32307

PC Setup:

• Dell Optiplex 9020 with monitor, keyboard, and mouse
• The PC is in working order with all passwords cleared. It contains a few Rigaku files, but no software programs appear to be installed.

Included Manuals/Software:

• 2 x Rigaku D/MAX 2000/PC Series Instruction Manual
• X-Ray Diffractometer Instruction Manual
• Rigaku Basic Software (Cat No.: 9240J101)
• Rigaku TTRAX3 and Ultima3 Software (Cat No.: 9240J101)
• Rigaku Special Order Software (U30megaP) (Cat No.: 9999)

Loose spare parts included:

• Rigaku Cat No.: 2701E201 (SN-AD08851)
• Container of round parts: Rigaku 900003 SH, w/Groove
• 2 x Small containers with unknown parts
• Scintag Generator Key
• Key labeled: "Microscope"
• Container of small metals, including:
• 1 x Bag labeled "Silicon"
• 1 x 640d Silicon Powder
• 2 x Tubs UCAR Spectroscopic Powder
• 1 x Tub labeled "Tung Flake"
• Approximately 20 x small containers of Silicon metal

Zeiss Axiovert 200M Confocal Microscope System with LSM510 META & Multi-Laser Setup

This system was removed from a university laboratory where it was surplus to requirements.

The previous owner confirmed it was in good working condition prior to removal.

The microscope connects to the PC and communicates successfully. The Meta software displays CAN errors on startup, which appear to be due to the lasers not being connected. Further testing was not possible without the lasers, but all indications suggest the system is otherwise functioning as intended.

The system is in good used cosmetic condition with typical signs of general use. It includes a comprehensive confocal setup featuring multiple laser modules, incubation controls, computing equipment, and imaging software.

The system comprises the following:

Zeiss Axiovert 200M Confocal Microscope, fitted with:

• Zeiss Plan-NEOFLUAR 20x/0.50.
• Zeiss Plan-NEOFLUAR 10x/0.30 ∞/0.17
• Zeiss 1095-490 Switching Mirror
• Zeiss 1058-431 Light Channel
• Zeiss 1039-685 HAL100 Halogen Lamp
• Zeiss 1007-980 HBO100 Mercury Lamp
• Zeiss 1005-847 LD Condenser 0.55 H, Ph1, Ph2, Ph3, DIC II, DIC III
• Zeiss 1005-834 Mechanical Stage
• Zeiss 1005-827 Binocular Tube 45º/23
• 2 x Zeiss 1016-758 W-PI 10x/23 Eyepieces

Laser Scanning & Illumination Components:

• Zeiss LSM510 META Module
• Carl Zeiss LSM 5 Laser Module 1018-382, including:
• Coherent Enterprise II Laser with ENTCII-653 Controller (October 1997)
• Coherent LASERPURE 5 LP-5I Cooling System with hoses
• Lasos LGK 7812 ML4
• Lasos LGK 7628-1 (October 2005)
• Lasos LGK 7786 P (March 2010)
• Lasos LGN3000 PSU
• Zeiss AIM-System 2101000343 ECU
• ebq100 Power Supply Unit

Environmental Control:

• Solent Scientific Incubation Chamber
• Solent Scientific Heater & Controller

Computing & Software:

• Fujitsu Siemens Celsius 600 PC (Windows 2000, passwords removed), with:
• Carl Zeiss AxioSet
• Carl Zeiss AIM – LSM510 Version 3.2SP2
• HP Compaq DC7600 PC (no key software or PCI cards)
• 2 x NEC monitors, mouse, and keyboard
• Manuals and software for most components

Additional:

• Various connection cables
• Small equipment table (included)

DCA Instruments UHV Cluster Tool / MBE Growth, Linear Sputtering, Pre-Clean, Load Lock & Wafer Transfer System

This system is offered for sale on behalf of a client as surplus to requirements.

The system was originally supplied by DCA Instruments to the University of Southampton in 2014 and has been used and maintained on site until Autumn 2022. It was reportedly in working order when switched off, and was restarted in July 2024 to assess its condition, with all items found to be working at that time.

The system is a complete UHV cluster tool configured for automated wafer transfer between multiple deposition, cleaning, storage and loading chambers. It is designed to handle wafer sizes up to 6” / 150 mm diameter and comprises two MBE growth chambers, one linear sputtering chamber, one pre-cleaning chamber, one central distribution chamber, one storage chamber and one cassette load lock.

The system can be offered as a complete package or split into individual sections, subject to agreement.

Guide Pricing

Whole system: £150,000

Deposition chambers M800: £50,000 each

Sputterer: £50,000

Cleaning chamber: £20,000

Load lock, CDC and storage: £10,000

The system is offered in as-seen condition. Disassembly, packing, insurance and transport will require suitable planning and specialist handling. The University of Southampton has indicated that it can offer support to enable the activities required for removal of the tool, together with logistical support.

System Overview

The complete system consists of:

2 x MBE growth chambers

1 x UHV linear sputtering chamber

1 x pre-cleaning chamber

1 x central distribution chamber / CDC

1 x UHV storage chamber

1 x cassette load lock

UHV cluster tool wafer transfer system

Electronics racks, control panels and associated control equipment

Bakeout systems

Additional spares package

The chambers are connected via a UHV cluster tool arrangement providing automatic wafer transfer between the process chambers.

The MBE growth chambers are identical vertical 800 mm ID chambers, each configured with ports for effusion cells, e-guns, an RF plasma atom source and RHEED. The sputtering chamber is a UHV linear sputtering system fitted with four rectangular magnetrons for sequential deposition. The pre-cleaning chamber provides high-temperature substrate annealing and argon ion etching via a Kaufman-type broad beam ion source. The UHV storage chamber allows storage of up to 10 substrates or masks under UHV conditions.

Included Main System Sections

1. MBE Growth Chambers

Two identical M800 UHV MBE growth chambers are included.

Each growth chamber is a vertical 800 mm ID chamber designed for 6” wafers, with deposition uniformity stated as better than ±1.5% over the wafer area.

Each chamber includes:

4 x ports for effusion cells or other sources

4 x base ports for e-guns

Large-area LN2 cryopanel surrounding the substrate area

Water cooling panel above the e-gun positions

Vacuum Barrier Corporation / VBC type LN2 feedthroughs

Horizontally mounted linear shutters for effusion cells and e-guns

Substrate loading port

RHEED screen and RHEED gun ports

Quartz monitor ports

Pyrometer port

RGA port

Video camera port

Viewports and spare ports

Each growth chamber includes the following accessories:

1 x NW150CF viewport with viewport shutter

1 x Convectron gauge head connected to rough pumping line

4 x NW63CF viewports, three with shutters

Growth Chamber Pumping & Gauging

Each growth chamber is equipped with a high-capacity turbo pumping system including:

1 x Pfeiffer HiPace 1200 turbopump, 1250 l/s

1 x VAT NW200CF electro-pneumatic gate valve for turbo pump

1 x CTI-8 CryoTorr cryopump and compressor with helium lines

1 x temperature display for cryo cold head

1 x VAT NW200CF electro-pneumatic gate valve for cryo pump

2 x nude ion gauge heads

1 x Granville-Phillips 350 ion gauge controller with four set-points

Growth Chamber Substrate Manipulators

Each chamber includes a 6” substrate manipulator with high-temperature SiC heater element, heavy-duty Z-manipulator, magnetically coupled rotary drive, motorised rotation and Z-lift.

Specifications include:

Maximum substrate temperature: up to 920°C

Note: one growth chamber is equipped with a prototype heater element with lower resistance and is limited to approximately 700°C

Temperature uniformity: better than ±5°C at 600°C

Maximum oxygen pressure: 2 x 10⁻⁵ Torr at 800°C

Substrate rotation speed: up to 60 RPM

25 mm Z-drive travel with stepper motor control

Eurotherm PID temperature controller

3 kW DC power supply

Bakeable power and thermocouple cables

Safety interlock switches

Growth Chamber Sources & Deposition Hardware

Each growth chamber is equipped with:

3 x Telemark 100 cc UHV single pocket e-guns

4 x 155 cc dual filament effusion cells

4 x Eurotherm 3508 dual temperature controllers

4 x TDK-Lambda DC dual power supplies

1 x MAT60 RF plasma source for atomic oxygen/nitrogen

1 x 155 cc effusion cell mounting / reloading module

Source shutters for effusion cells and e-guns

Quartz rate monitoring system

Main substrate shutter

Effusion cells have a stated maximum continuous operating temperature of 1,400°C and include integral water-cooling shrouds.

2. UHV Linear Sputtering System

The sputtering chamber is a rectangular UHV chamber with four bottom-mounted magnetron positions. The substrate is moved linearly over the magnetrons for sequential deposition and scanning during deposition.

Sputtering Chamber Pumping & Gauging

Included with the sputtering chamber:

1 x Pfeiffer HiPace 1200 turbopump, 1250 l/s

1 x VAT NW200CF gate valve

1 x DCA UHV conductance control valve

1 x DCA valve controller

1 x nude ion gauge head

1 x Granville-Phillips 350 ion gauge controller

1 x MKS 100 mTorr full-scale Baratron with shut-off valve

Sputtering Chamber Substrate Manipulator

The sputtering chamber includes a substrate holder with motorised linear movement for accepting a 6” wafer and transporting it across the four deposition positions.

The heater stage allows heating up to 400°C and includes:

1 x SiC or foil filament heater element

1 x 1.5 kW DC power supply

1 x Eurotherm controller

1 x K-type thermocouple

Magnetrons & Power Supplies

The sputtering chamber includes:

4 x rectangular UHV magnetrons for 10” x 2” target size

1 x spare Advanced Energy rectangular UHV magnetron for 10” x 2” target size

4 x electro-pneumatic rotary shutters

1 x 3 kW DC power supply

1 x 1 kW RF power supply

4 x auto-tuning units

1 x RF/DC switch

Gas Manifold

The sputtering chamber gas manifold includes:

1 x 100 sccm MFC for argon

1 x 100 sccm MFC for oxygen

1 x 100 sccm MFC for third gas

3 x electro-pneumatic shut-off valves

1 x 4-channel MKS 146 controller

Sputtering Quartz Rate Monitor

The sputtering chamber includes:

4 x UHV quartz monitor heads

4 x electro-pneumatic shutters for the crystal

1 x quartz rate controller

3. Central Distribution Chamber / CDC

The CDC is a true UHV cluster tool wafer handler with magnetically coupled dual-axis wafer handling robot. It provides automated transfer between the process chambers.

Included:

1 x CDC chamber module with connection for up to six process chambers

1 x UHV wafer transfer robot with 6” end effector

5 x NW100CF viewports

5 x NW200CF electro-pneumatic gate valves

1 x 400 l/s ion pump

1 x titanium sublimation pump / TSP on NW200CF flange with water cooling panel

1 x nude ion gauge head

1 x Granville-Phillips 350 ion gauge controller

4. Cassette Load Lock

The cassette load lock allows loading of a cassette with up to 10 molybdenum substrate holders. It is turbo pumped and includes an internal heater stage for outgassing of cassette and substrates before transfer into the CDC chamber.

Included:

1 x vertical load lock chamber

1 x Viton-sealed quick access front-loading door

1 x 10-position platen loading cassette

1 x vent valve

1 x motorised vertical cassette Z-lift

1 x laser-based wafer position indicator

Molybdenum 6” wafer holders, exact quantity uncertain

1 x Pfeiffer HiPace 700 l/s turbopump

1 x NW150CF VAT electro-pneumatic gate valve

1 x nude ion gauge head

1 x Convectron gauge head

1 x Granville-Phillips 358 gauge controller

Internal Load Lock Heater

The internal load lock heater allows outgassing up to 200°C and includes:

1 x quartz lamp heater system

1 x temperature controller

1 x power supply

1 x timer

1 x vacuum interlock

5. Pre-Cleaning Chamber

The pre-cleaning chamber allows high-temperature outgassing of substrates and molybdenum holders before growth. It also includes a broad beam ion source for substrate surface cleaning and is separated from the CDC vacuum by a gate valve.

The chamber includes:

1 x UHV chamber with NW200CF connecting flange to CDC

1 x water-cooled chamber wall assembly

1 x high-temperature heater stage

1 x Eurotherm 3508 temperature controller

1 x DC power supply

1 x stainless steel support table

Ion Source

The ion source package includes:

1 x Kaufman-type broad beam ion source

1 x ion source power supply and controller

1 x 10 sccm mass flow controller for argon

1 x electro-pneumatic shut-off valve for argon supply

Pre-Clean Pumping & Gauging

Included:

1 x Pfeiffer HiPace 700 l/s turbopump

1 x Pfeiffer Adixen ACP 15 dry roots pump

1 x NW150CF VAT electro-pneumatic gate valve

1 x nude ion gauge head

1 x Granville-Phillips 350 ion gauge controller

6. Storage Chamber for Substrates & Masks

The storage chamber is used for substrate and/or mask storage under UHV. It is attached directly to the CDC chamber and shares the CDC vacuum.

Included:

1 x vertical storage chamber

1 x NW100CF viewport

1 x 10-position molybdenum holder / mask storage cassette

1 x motorised vertical cassette Z-lift

1 x laser-based platen position indicator

The chamber allows storage of up to 10 x 150 mm wafers. Contact masks can be loaded and removed in situ.

7. Bakeout Systems

The growth chambers, sputtering chamber, pre-clean chamber and CDC chamber have separate bakeout systems.

Included:

2 x flexible bakeout tents for growth chambers

1 x flexible bakeout tent for CDC chamber

1 x flexible bakeout tent for sputtering chamber

1 x flexible bakeout tent for pre-clean chamber

2 x movable bakeout heater units with forced air circulation

2 x K-type thermocouples

2 x temperature controllers

2 x timers

2 x vacuum interlocks

Separate heating jacket for the storage module

8. Electronics Racks & Control Equipment

The system includes the following control equipment:

5 x 19” rack mounting cabinets

5 x power distribution panels with circuit breakers

4 x emergency power off switches

3 x shutter and valve controller panels for manual operation

1 x interlock control panel with safety interlocks

1 x CDC controller with touchscreen control panel

Additional Spares Included

The following spares are included with the system:

1 x Pfeiffer HiPace 1200 turbomolecular pump, new

1 x SiC heating element for manipulators of growth or degas chambers, new

1 x Advanced Energy rectangular magnetron, 26532-LA Onyx UHV Standard Magnetron, new

Complete set of sputterer shields and clamps to allow continuous operation while one set is sent for cleaning

MAT60 spares package including:

2 x quartz discharge tubes

5 x quartz aperture plates

12 x alumina aperture plates with angled holes for optimised oxygen flux across 6” wafer

2 x spare tantalum shutters for e-guns

3 x spare tantalum shutters for K-cells

Condition

This system was used and maintained on site until Autumn 2022. It was reportedly still in working order when switched off and was restarted in July 2024 to assess its condition, with all items found to be working at that time.

The system is offered in as-seen condition. No further testing has been carried out by UniGreenScheme. Buyers are strongly advised to inspect the system and satisfy themselves as to its condition, configuration, completeness and suitability prior to purchase.

Due to the complexity, scale and specialist nature of the equipment, professional decommissioning, disassembly, packing, insurance and transportation will be required.

Removal, Logistics & Support

The system is located at the University of Southampton.

The University of Southampton has indicated that it can provide support to enable the activities required for removal of the tool, together with logistical support. Any removal, lifting, specialist contractor work, packing, insurance and transport costs are to be agreed separately.

Notes

This is a specialist UHV deposition and wafer-handling cluster tool and is suitable for experienced users with the appropriate facilities, infrastructure and technical capability to install, commission and operate the equipment.

This item is new in stock. Please enquire for further details.